扫描干涉术在光学非球面测量中的实验研究

摘要：学非球面元件是形貌相比球面元件有所偏离的元件，有着更高的设计自由度，能有效的减小像差，精简系统。但是非球面的检测技术已经成了非球面进一步发展的瓶颈。本文利用轴向扫描干涉的技术，通过分析待测件的参数，对扫描路径进行划分。同时结合所有 CCD 板的分辨率，根据其非球面度和陡度，划分每一个子孔径的测量范围。在找到每一个子孔径的零位位置后，处理每一个环域的数据，最后通过算法恢复出全口径的非球面形貌，得到面形偏差。

仿真完成后，对一个给定的待测非球面进行了实际的实验研究。将本文的算法获得的处理结果和 Taylor Hobson 轮廓仪对比，RMS 偏差仅在/30 量级，验证了本方法的正确性。

关键词非球面轴向扫描面形恢复相位连接

毕业设计说明书外文摘要

Title Experimental Study on The Measurement of Optical Aspheric Surface Using Scanning Interference

Abstract:The optical aspheric element is an element that deviates from a spherical one, which is more freely to be designed and has great advantages of improving the quality of image, as well as simplifying the system. However, the technology of measuring the aspheric surface has been a bottleneck of its further development. Measuring the aspheric surface with scanning interference, we shall finish the job of setting the scanning path of the test by analyzing the parameters of the measuring element. With the considerations of resolution of the CCD used, we know the range of each sub-aperture measured according to the asphericity and steepness. After finding the null position of every sub-aperture, the data of its loop domain can be processed. Finally, the shape of the whole aspheric surface can be restored by our algorithm, as well as the shape deviation.

Finishing the work of the simulation, we studied on a given aspheric surface. Comparing with the test result of Taylor Hobson, the processing result of my algorithm only has a little difference in the value of RMS, at the level of /30.

Keywords Asphere Scanning on-axis Surface restoration Phase connection

1 绪论 . 1

1.1 光学非球面 . 1

1.1.1 光学非球面的应用 1

1.1.2 光学非球面的参数特性 2

1.1.3 光学非球面的测量必要性 2

1.2 基于环域数据的非球面测试方法概述 . 2

1.2.1 非球面检测的方法 3

1.2.2 环形子孔径拼接方法检测非球面 4

1.3 基于环域数据的非球面测试方法国内外现状及发展趋势 4

1.4 本文研究的主要内容 8

2 轴向扫描干涉法测量非球面形貌的基本原理 . 9

2.1 测试方法数理模型 . 9

2.2 非球面的基本参数分析及测量范围确定 10

2.2.1 非球面的最佳拟合球 . 11

2.2.2 非球面度和非球面度梯度 . 12

2.2.3 非球面的散焦范围 . 13

2.2.4 非球面测量范围的确定 . 13

2.3 环域数据求解方法 14

2.3.1 零位位置曲率半径求取 . 15

2.3.2 环域数据其他位置曲率半径求取 . 16

2.3.3 非球面形貌恢复 . 16

2.4 相位连接求解方法 17

2.5 本章小结 17 扫描干涉术在光学非球面测量中的实验研究:http://www.chuibin.com/wuli/lunwen_205568.html