钛合金表面含ZnO的复合陶瓷膜的制备工艺研究

本文使用Ti-6Al-4V作为基底，在直流模式下采用PED(等离子体电解沉积)与PES（等离子体电解渗透）相结合的方式制备含ZnO的复合陶瓷膜层。在不同的工艺参数下制得样品，并对样品进行物相、形貌与性能检测。结果表明：在参数为285V10min，285V5min，265V10min三个工艺参数下可以获得氧化锌薄膜，且同时有一定量的C原子的渗入，成功制备了含ZnO的复合陶瓷膜层，而在其他工艺条件下，未发现ZnO的存在。制备得到的ZnO膜层在SEM下呈现为六角柱状结构构造的岛状结构与树枝状结构。对其极化曲线进行了测定，结果表明在基底表面生长了一层ZnO膜层后，其自腐蚀电位上升，更难发生腐蚀，但自腐蚀电流增大，腐蚀速率增加。对其接触角进行测定，发现长膜前后其接触角由55°变为113°，由亲水变为疏水。

关键词等离子体电解沉积钛合金氧化锌疏水性

Title Study on Preparation Technology of Composite Ceramic Membrane Containing ZnO on Titanium Alloy Surface

Abstract：In this paper, Ti-6Al-4V acts as the substrate for the preparation of the composite ceramic coating containing ZnO in the way of combining PED (plasma electrolytic deposition) and PES (plasma electrolytic permeation) in DC mode. The samples prepared under different process parameters are tested for their phase, morphology and properties. The result shows that zinc oxide films can be obtained under the parameters of 285V 10min, 285V 5min and 265V 10min, and at the same time, a certain amount of C atoms penetrate into the substrate so that the composite ceramic coatings containing ZnO are successfully prepared. However, no any presence of ZnO is found under other conditions. Being observed under the SEM, the surface of the ZnO film is rough and unsmooth, and the structure of it is mainly the island structure and dendritic structure which are constructed by hexagonal column structure. The result of the measure for its polarization curve shows that the samples’ corrosion resistance decreases after the growth of the ZnO films on the surface of the substrate. The result of the measure of its contact angle shows that the wettability of the sample is changed from hydrophilic to hydrophobic.

Keywords PED Titanium alloy surface modification Zinc oxide film

1引言 1

1 钛合金表面改性技术简介 1

1.2ZnO的特性及其应用 2

1.3ZnO薄膜的制备工艺现状 4

1.4本课题的研究内容及其意义 6

2 等离子体电解沉积理论、实验与表征 7

2.1基本原理 7

2.2实验方案 7

2.3ZnO薄膜的性能及其表征 10

3 ZnO薄膜的物相、表面形貌与性能分析 11

3.1 薄膜物相分析 11

3.2薄膜表面形貌分析 14

3.3 EDS能谱分析 16

3.4 膜层的电化学腐蚀分析… 钛合金表面含ZnO的复合陶瓷膜的制备工艺研究:http://www.chuibin.com/cailiao/lunwen_205363.html