MEMS柔性温湿度集成传感器研究

摘要：温度和湿度传感器早已应用到工业生产、航天航空、生物医学等诸多领域，随着集成电路和可穿戴电子的发展，对传感器提出了微型化、集成化、智能化、柔性、可自由弯曲的要求。

本文制作并测试了一种基于MEMS工艺的柔性温湿度集成传感器。采用聚酰亚胺胶带作为柔性衬底；利用热敏原理测量电阻；用聚酰亚胺的吸湿特性制作电容式湿度传感器,并通过MEMS工艺实现了小尺寸、低成本、低能耗的要求。

对器件测试结果表明，制作的温度传感器在20℃～100℃范围有很好的线性，灵敏度是0.0263Ω/℃；湿度传感器在测试前进行预处理可以在30%RH～80%RH范围内获得较好的线性，最大灵敏度是1.120pF/%RH。通过增加极板相对面积或者减小聚酰亚胺吸湿层厚度，可以增加湿度单元的灵敏度。

关键词聚酰亚胺 MEMS工艺柔性温度传感器湿度传感器

Title Study on Flexible Integrated Temperature and Humidity Sensor Based on MEMS Technology

Abstract：Nowadays, temperature and humidity sensors have been greatly applied to fields, such as industrial production, aerospace and biomedical, etc.With the development of integrated circuits and wearable electronics, sensors need to achieve lots of requirements, such as miniaturization, integration, intelligent, flexible, and free bending.

In this paper, a flexible integrated temperature and humidity sensor based on MEMS is fabricated and tested. Polyimide tape is used as a flexible substrate. The thermal principle is used to measure the resistance. A capacitive humidity sensor is fabricated using the moisture absorption characteristics of polyimide. And small size, low cost, low energy consumption requirements are achieved through the MEMS.

The test results show that the temperature unit has a good linearity in the range of 20 ℃～100 ℃, the sensitivity is 0.0263Ω/℃. The humidity unit is pretreated prior to testing to achieve better linearity in the range of 30% RH ～ 80% RH. The maximum sensitivity of the humidity unit is 1.120pF/% RH. By increasing the relative area of the plate or reducing the thickness of the polyimide layer, the sensitivity of the humidity unit is increased.

Keywords polyimide MEMS flexible temperature sensor humidity sensor

1 引言 1

1.1 柔性温湿度集成传感器介绍 1

1.1.1 集成电路与摩尔定律 1

1.1.2 MEMS技术（微机电系统） 1

1.1.3 柔性电子器件 2

1.1.4 柔性温湿度集成传感器的研究意义 2

1.2 温湿度集成传感器的现状 2

1.2.1 温度传感器概况 3

1.2.2 湿度传感器概况 3

1.3 本论文研究内容 4

2 MEMS基本工艺简介 5

2.1 光刻工艺 5

2.1.1 MEMS柔性温湿度集成传感器研究:http://www.chuibin.com/cailiao/lunwen_205160.html